Business Partners

Hermes-Epitek delivers optimized product packages for semiconductor manufacturing equipment, integrates equipment from different vendors to not only achieve optimum equipment performance for clients but also secure the highest market acceptance of related equipment suppliers.

The total number of equipment installed

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The Sustaining Force Behind Success Stories

Since the founding of Hermes-Epitek over 40 years ago, we have achieved multiple industry records:

We have participated in many of the construction of silicon wafer manufacturing plants in Taiwan and Southeast Asia; in the past decade, we have also participated in the establishment of factories founded in China.

22,000 semiconductor and opto-electronic equipment installed

1,200 members worldwide service team

200 semiconductor and opto-electronic plants served

40 years of professional services

24 hours non-stop, year-round technical support

20 worldwide business locations

Advanced Ion Beam Technology, Inc. (台灣)

  • Ion Implantation: Ion Implanter (A Hermes-Epitek subsidiary company)

Sumitomo (日本)

  • Ion Implantation: Ion Implanters and Plasma Doping

漢民測試系統股份有限公司 (台灣)

Hermes Testing Solutions, Inc. (HTSI)

提供全方位半導體測試解決方案

Benchmark Technologies (美國)

  • Lithography: Reticles/Masks; Focus Analysis tool; Software

Mycronic AB (瑞典)

  • Leading supplier of production solutions to the electronics industry
  • Pattern Generators: Display, Semiconductor, Touch Panels and Advanced Packaging
  • Surface Mount Technology Equipment: Placement, Jet Printing and Component Storage

TC TECH Sweden AB (瑞典)

A patented unique system for the production of light guide plates

  • TCP 1000 HT/HP; 150 HPE; 100 HP
  • TCP EE, Edge Embossing

Taiwan Electron Microscope Instrument Corporation (台灣)

桌上型掃描電子顯微鏡與液態檢測模組

  • Desktop SEM & Liquid-Phase Inspection Modules
  • BEI + STEM analysis
  • Energy dispersive X-ray spectrometer (EDS) for elemental analysis
  • Software for 3D view and surface roughness measurement functions

Fujikin Incorporated (日本)

  • Parts: FCS ( Flow Control System ), IGS (Integrated Gas System )

ASMPT (新加坡)

ASM Pacific Technology Limited (ASMPT) is a leading integrated solutions provider in Semiconductor and Electronics industries. We have three business segments – Back-end Equipment, Materials, and NEXX Products.

ORC (日本)

  • Stepper : Bump, Cu Post, RDL, TSV
  • lamp : UV lamp

倍利科技(台灣)

倍利科技持續致力發展智慧影像分析與深度學習技術,應用在智慧製造、智慧醫療、智慧交通安控等領域,並提供跨平台整合技術

  • Automated OM
  • AI ADC
  • 2D AOI (Automated Optical inspection)

Comet Yxlon (德國)

  • 2D/3D X-ray檢測

Tricorn (台灣)

  • VOC / AMC detector in manufacturing environment with sub-ppb level of capability.

東京電子器件株式會社 (日本)

      RAYSENS是一種巨觀檢測機台,利用光學技術檢測光線的微小變化,
      而高速、高靈敏地偵測晶圓上的缺陷。

  • Wafer inspection system

OAI (美國)

OAI is a Silicon Valley-based manufacturer of advanced precision equipment for the Solar, Photovoltaic, Semiconductor, MEMS, and Microfluidics Industries.

Mask Aligner
UV meter & Probes

Cowin DST CO, LTD. (韓國)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

Nearfield Instruments (荷蘭)

 為先進半導體製程發展,提供全進化的量測及檢測解決方案。
全自動超高速 3D掃描探針顯微鏡,對於發展及監測以下先進製程特別有幫助:

  • CMP:Hybrid bonding,表面平整度及粗糙度
  • (High NA) 極紫光黃光製程:光阻量測及缺陷檢測
  • 高深寬比結構量測
  • 表面下對準及缺陷量測

鈺祥企業股份有限公司 (台灣)

  • AMC Chemical Filter 除酸&鹼&有機氣體三效化學濾網
  • HEPA / ULPA 高效除塵濾網

鏵友益科技股份有限公司 (台灣)

  • Ÿ In-Situ Macro

  • Ÿ 檢驗系統

E&R 鈦昇 (台灣)

線上拉曼光譜儀,為磊晶及薄膜製程提供非破壞性量測解決方案  

  • 磊晶/薄膜應力量測
  • 磊晶/薄膜參雜濃度量測
  • 可針對不同結構或不同尺寸晶圓量測做客製化機台

Fashion Semicon Technology Co., Ltd

Auto laser de-bonder Equipment for temporary bonding process.

  • Laser de-bonder
  • Clean module
  • Clean chemical (release film, glue)
  • Temporary bonding material
  • De-tape module

JTEKT CORPORATION (Japan)

JTEKT CORPORATION (Japan)

Oven/furnace tool

  • Oven/furnace tool

Advanced Ion Beam Technology, Inc. (Taiwan)

  • Ion Implantation: Ion Implanter (A Hermes-Epitek subsidiary company)

Sumitomo (Japan)

  • Ion Implantation: Ion Implanters and Plasma Doping

Hermes Testing Solutions Inc.

Testing Solutions

Benchmark Technologies (United States)

  • Lithography: Reticles/Masks; Focus Analysis tool; Software

Mycronic AB (Sweden)

  • Leading supplier of production solutions to the electronics industry
  • Pattern Generators: Display, Semiconductor, Touch Panels and Advanced Packaging
  • Surface Mount Technology Equipment: Placement, Jet Printing and Component Storage

TC TECH Sweden AB (Sweden)

A patented unique system for the production of light guide plates

  • TCP 1000 HT/HP; 150 HPE; 100 HP
  • TCP EE, Edge Embossing

Taiwan Electron Microscope Instrument Corporation (Taiwan)

Desktop Scanning Electron Microscope & Liquid-Phase Inspection Modules

  • Desktop SEM & Liquid-Phase Inspection Modules
  • BEI + STEM analysis
  • Energy dispersive X-ray spectrometer (EDS) for elemental analysis
  • Software for 3D view and surface roughness measurement functions

Fujikin Incorporated (Japan)

  • Parts: FCS ( Flow Control System ), IGS (Integrated Gas System )

ASMPT

ASM Pacific Technology Limited (ASMPT) is a leading integrated solutions provider in Semiconductor and Electronics industries. We have three business segments – Back-end Equipment, Materials, and NEXX Products….

ORC (Japan)

  • Stepper : Bump, Cu Post, RDL, TSV
  • lamp : UV lamp

V5 Technologies

Leading Company of AI and Image Processing Technologies

  • Automated OM
  • AI ADC
  • 2D AOI (Automated Optical inspection)

Comet Yxlon

  • 2D/3D X-ray Inspection

Tricorn (Taiwan)

  • VOC / AMC detector in manufacturing environment with sub-ppb level of capability.

Tokyo Electron Device

RAYSENS is a macro inspection system that can detect defects on wafers with high speed and high sensitivity using optical technology that captures slight changes in light.

  • Wafer inspection system

OAI(US)

Optical Associates Inc.

OAI is a Silicon Valley-based manufacturer of advanced precision equipment for the Solar, Photovoltaic, Semiconductor, MEMS, and Microfluidics Industries.

  • Mask Aligner
  • UV meter & Probes

Cowin DST CO, LTD. (Korea)

  • FPD: Light Leakage Repair System; Pad Pattern Repair System; Half Tone Photo Mask Repair System
  • PV: Laser Selective Emitter Doping & Real Metal Contact
  • TSP: Laser Direct Patterning System; Cover Glass Hole Drilling & Edge Polishing System

Nearfield Instruments (the Netherlands)

Nearfield Instruments develops and delivers revolutionary metrology and inspection solutions for the advanced semiconductor manufacturing industry.

Automated unrivalled high-throughput 3D scanning probe microscopes for process development
and control of:

  • CMP: Hybrid bonding, flatness & roughness
  • (High NA) EUV lithography: photoresist metrology and defectivity
  • High aspect ratio structures for deep and narrow trenches and holes
  • Subsurface overlay/ defectivity

YESIANG Enterprise Co., Ltd.

  • AMC Chemical Filter
  • HEPA / ULPA

HYE Technology

  • Ÿ In-Situ Macro

  • Ÿ Inspection System

E&R

In-Line Raman provides non-destructive metrology solutionfor Epi and thin film process

  • Epi/Thin film strain and stress
  • Epi/Thin film dopant concentration
  • Customizable for different structure and different size wafer