Providing Customized Solutions
Hermes-Epitek’s ATOM series fully automatic coaters/developers are suitable for the processing of wafers of various sizes. The equipment mainly consists of a cassette station, alignment, transfer, coating, thermal processing, chemical supply, waste discharge system, and control modules, operated through a graphical user interface. Hermes-Epitek has a high market share in LED, Micro-LED, and semiconductor back-end processes. After years of research, development, and improvement, the ATOM series entered the compound semiconductor market in 2021.
The entire system is independently developed and designed by Hermes-Epitek. It features in-house robotic arms, which provide high speed and easy maintenance, thereby delivering high productivity and uniformity. The system supports remote production management through automated systems, and complies with SEMI S2/S10 certifications. Therefore, it is able to offer diverse and customized solutions for clients across various industries.
