In a high vacuum chamber, the e-beam evaporation equipment heats the material by e-beam irradiation until it is vaporized. The material is then deposited onto the surface of the wafer to form a thin film.
E-beam Evaporator
E-beam Evaporator
Diverse component combinations available
Flexible system configurations
Simple graphical operating interface
Supports general equipment standard communication protocols
Supports multiple operator privilege settings
Multi-function data recording
Supports multi-layer process parameters
Inquery Contact
Taiwan
China
